MEMS/MST manufacturing uses a diversity of tools and processes. To help the industry make informed decisions about tool purchases and process definitions, this chapter reduces the diverse field to 10 standard processes by which a majority of bulk and surface micromachining devices can be made. The toolset needed for that is relative limited in number. It is a mix of general thin film equipment like CVD equipment, lithography tools etc. and specific MST/MEMS equipment like Deep Reactive Ion Etchers and backside aligners.
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